Numerical analysis of tiny-focal-spot generation by focusing linearly, circularly, and radially polarized beams through a micro/nanoparticle

Obtaining a tiny focal spot is desired for super resolution. We do vectorial numerical analysis of the linearly, circularly, and radidally polarized electromagnetic fields being focused through dielectric micro/nanoparticle size comparable to wavelength. find spots (up ∼ 0.05 λ 2 ) can be obtained behind micro/nanoparticles various shapes, e.g. spherical, disk-shaped, cuboid micro/nanoparticles. Furthermore, we also investigate influence misalignment real lens system on spots. that still generated even though they are distorted due misalignment.